This work presents a novel synthesis process for selectively locally growing nanowires on a microreactor chip fabricated by MEMS processes. Nanowires are synthesized in a microchamber by patterned catalysts, reactive gases, and integrated microheaters heating the catalysts to the required temperatures for nanowires growth. Using a field emission scanning electron microscope (FE-SEM) and a transmission electron microscope (TEM), this paper confirms that the synthesized structures are multi-wall carbon nanotubes (CNT). The average diameter of the CNTs is about 16.93 nm and the length is about 100-200 nm. Applying this novel process, the location of the synthesized CNTs can be positioned onto the microheaters in a controllable way. Furthermore, by means of the developed microheater modeling, the chemical vapor deposition CNTs synthesis process can be conducted in low temperature and a low voltage as small as 7 V is required for the microheaters. The proposed synthesis approach makes it possible to integrate CNTs on IC devices by effectively diminishing thermal damage during their growing process.
- Carbon nanotubes (CNTs)