Selective functionalization on ultra-thin body FETs

H. H. Liu, Y. S. Lin, C. C. Chen, Jeng-Tzong Sheu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new method of selective functionalization of ultra-thin body field-effect transistors (UTBFETs) is reported for biosensor applications. A polymer film, Polymethylmethacrylate (PMMA), is used as blocking layer and is ablated electrically at the specific region on UTBFETs by localized joule heating. The exposed site was then functionalized with a chemical linker molecule, N-(2-Aminoethyl)- 3-aminopropyl-trimethoxysilane (AEAPTMS), while the surrounding area is still protected by the chemically inert polymer layer. As demonstration, both gold nanoparticles (AuNPs) and fluorescein isothiocyanate (FITC) molecules are selectively bound onto the linker molecules subsequently on the surface of exposed binding sites of UTBFETs.

Original languageEnglish
Title of host publicationNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages1000-1003
Number of pages4
DOIs
StatePublished - 4 Oct 2011
Event6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan
Duration: 20 Feb 201123 Feb 2011

Publication series

NameNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
CountryTaiwan
CityKaohsiung
Period20/02/1123/02/11

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  • Cite this

    Liu, H. H., Lin, Y. S., Chen, C. C., & Sheu, J-T. (2011). Selective functionalization on ultra-thin body FETs. In NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 1000-1003). [6017524] (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems). https://doi.org/10.1109/NEMS.2011.6017524