Scheduling and control of a wafer transfer robot for foundry equipment innovation competition

Kai Tai Song*, Song Qing Ou, Cheng An Yang, Yu Xuan Sun, Li Ren Kang, Zhen Yu Wang, Yu Shin Wang, Pei Chun Lu, Chun Long Ko, Yao Hsiang Chen

*Corresponding author for this work

Research output: Contribution to journalConference article

Abstract

This paper presents a design and implementation of a wafer transfer robotic system for a Foundry Equipment Innovation Competition. In this system, a 4-DOF robotic arm was designed and constructed for wafer transfer between a cassette and processing chambers. The purpose of this competition was to promote intelligent automation for wafer fabrication, in which multiple wafers and chambers need to be handled simultaneously. A scheduling algorithm is proposed for efficient task execution of wafer to process recipes assigned during the competition. The task also features to integrate defect detection and endpoint determination of wafer processing. The robot was required to receive the processing data from the mission platform to determine the endpoint of wafer processing in a chamber and complete the recipe automatically. The online inspection algorithm detects wafer defects during the task execution and report to the task planner. The state of each wafer and chamber are taken into consideration for scheduling in order to complete the wafer fabrication in an efficient and flexible manner. The developed robotic system spent 9 minutes to complete the assigned mission of transferring 6 wafers among multiple chambers and 2 cassettes and achieved 93.4% defect-detection rate in the competition.

Original languageEnglish
Pages (from-to)624-632
Number of pages9
JournalIFAC-PapersOnLine
Volume52
Issue number15
DOIs
StatePublished - Sep 2019
Event8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 - Vienna, Austria
Duration: 4 Sep 20196 Sep 2019

Keywords

  • Robot control
  • Task scheduling
  • Wafer defect detection
  • Wafer robot

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