Scanning tunneling microscope tip-induced anodization for nanofabrication of titanium

Hiroyuki Sugimura, Tatsuya Uchida, Noboru Kitamura, Hiroshi Masuhara*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

119 Scopus citations


The fabrication of oxide patterns on titanium (Ti), with a spatial resolution of 20 nm, was accomplished by the use of a scanning tunneling microscope (STM) through applying a positive sample bias (Vs) voltage of +3.0 to +8.0 V in the presence of adsorbed water on Ti. The fabricated patterns were observed as swelled structures in the STM images acquired at Vs = -3.0 V. Surface swelling was induced only when Vs was set positively, and the height of the oxide layer increased with increasing Vs, which suggested that the pattern formation was attributed to electrochemical oxidation of Ti; anodization of Ti with adsorbed water. The role of the faradaic current flows during STM tip-induced anodization for tip control is also discussed in terms of a scanning electrochemical microscope.

Original languageEnglish
Pages (from-to)4352-4357
Number of pages6
JournalJournal of physical chemistry
Issue number16
StatePublished - 1 Jan 1994

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