Scanning tunneling microscope tip-induced anodization for nanofabrication of titanium

Hiroyuki Sugimura; Tatsuya Uchida; Noboru Kitamura; Hiroshi Masuhara

doi:10.1021/j100067a023

Scanning tunneling microscope tip-induced anodization for nanofabrication of titanium

Hiroyuki Sugimura, Tatsuya Uchida, Noboru Kitamura, Hiroshi Masuhara^*

^*Corresponding author for this work

Department of Applied Chemistry

Research output: Contribution to journal › Article › peer-review

119 Scopus citations

Abstract

The fabrication of oxide patterns on titanium (Ti), with a spatial resolution of 20 nm, was accomplished by the use of a scanning tunneling microscope (STM) through applying a positive sample bias (V_s) voltage of +3.0 to +8.0 V in the presence of adsorbed water on Ti. The fabricated patterns were observed as swelled structures in the STM images acquired at V_s = -3.0 V. Surface swelling was induced only when V_s was set positively, and the height of the oxide layer increased with increasing V_s, which suggested that the pattern formation was attributed to electrochemical oxidation of Ti; anodization of Ti with adsorbed water. The role of the faradaic current flows during STM tip-induced anodization for tip control is also discussed in terms of a scanning electrochemical microscope.

Original language	English
Pages (from-to)	4352-4357
Number of pages	6
Journal	Journal of physical chemistry
Volume	98
Issue number	16
DOIs	https://doi.org/10.1021/j100067a023
State	Published - 1 Jan 1994

Access to Document

10.1021/j100067a023

Fingerprint Dive into the research topics of 'Scanning tunneling microscope tip-induced anodization for nanofabrication of titanium'. Together they form a unique fingerprint.

Cite this

@article{b1998f774624404bb3fec4659ec69151,

title = "Scanning tunneling microscope tip-induced anodization for nanofabrication of titanium",

abstract = "The fabrication of oxide patterns on titanium (Ti), with a spatial resolution of 20 nm, was accomplished by the use of a scanning tunneling microscope (STM) through applying a positive sample bias (Vs) voltage of +3.0 to +8.0 V in the presence of adsorbed water on Ti. The fabricated patterns were observed as swelled structures in the STM images acquired at Vs = -3.0 V. Surface swelling was induced only when Vs was set positively, and the height of the oxide layer increased with increasing Vs, which suggested that the pattern formation was attributed to electrochemical oxidation of Ti; anodization of Ti with adsorbed water. The role of the faradaic current flows during STM tip-induced anodization for tip control is also discussed in terms of a scanning electrochemical microscope.",

author = "Hiroyuki Sugimura and Tatsuya Uchida and Noboru Kitamura and Hiroshi Masuhara",

year = "1994",

month = jan,

day = "1",

doi = "10.1021/j100067a023",

language = "English",

volume = "98",

pages = "4352--4357",

journal = "Journal of Physical Chemistry",

issn = "0022-3654",

publisher = "American Chemical Society",

number = "16",

}

TY - JOUR

T1 - Scanning tunneling microscope tip-induced anodization for nanofabrication of titanium

AU - Sugimura, Hiroyuki

AU - Uchida, Tatsuya

AU - Kitamura, Noboru

AU - Masuhara, Hiroshi

PY - 1994/1/1

Y1 - 1994/1/1

N2 - The fabrication of oxide patterns on titanium (Ti), with a spatial resolution of 20 nm, was accomplished by the use of a scanning tunneling microscope (STM) through applying a positive sample bias (Vs) voltage of +3.0 to +8.0 V in the presence of adsorbed water on Ti. The fabricated patterns were observed as swelled structures in the STM images acquired at Vs = -3.0 V. Surface swelling was induced only when Vs was set positively, and the height of the oxide layer increased with increasing Vs, which suggested that the pattern formation was attributed to electrochemical oxidation of Ti; anodization of Ti with adsorbed water. The role of the faradaic current flows during STM tip-induced anodization for tip control is also discussed in terms of a scanning electrochemical microscope.

AB - The fabrication of oxide patterns on titanium (Ti), with a spatial resolution of 20 nm, was accomplished by the use of a scanning tunneling microscope (STM) through applying a positive sample bias (Vs) voltage of +3.0 to +8.0 V in the presence of adsorbed water on Ti. The fabricated patterns were observed as swelled structures in the STM images acquired at Vs = -3.0 V. Surface swelling was induced only when Vs was set positively, and the height of the oxide layer increased with increasing Vs, which suggested that the pattern formation was attributed to electrochemical oxidation of Ti; anodization of Ti with adsorbed water. The role of the faradaic current flows during STM tip-induced anodization for tip control is also discussed in terms of a scanning electrochemical microscope.

UR - http://www.scopus.com/inward/record.url?scp=33645215493&partnerID=8YFLogxK

U2 - 10.1021/j100067a023

DO - 10.1021/j100067a023

M3 - Article

AN - SCOPUS:33645215493

VL - 98

SP - 4352

EP - 4357

JO - Journal of Physical Chemistry

JF - Journal of Physical Chemistry

SN - 0022-3654

IS - 16

ER -