Rotary silicon polymeric composite thermal micro-actuator

Jiaping Yang*, Cheng Peng Tan, Nyok Boon Chong, Gih Keong Lau

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a new rotary thermal micro-actuator. This new thermal actuator uses a pair of powerful silicon-polymeric composite benders to actuate a magnetic head slider into a rotation when the expandable polymer elements are resistively heated. The advantage is the rotary micro-actuator design can move the read/write head slider with a larger lateral displacement by using a new T-shape central hinge joint as compared to the previous translational design. The experimental results demonstrate that the prototyped device can reach up 314nm displacement by a 4V step voltage. The 1st mechanical resonance frequency has been pushed up to 35 kHz. Simulation shows that the micro-actuator can be subjected to 1000G shock loading under non-operation mode. The large displacement, high resonance frequency and robust shock resistance make the rotary thermal micro-actuator be very suitable for a wide range of precise positioning systems applications including dual-stage positioning systems in disk drives and resonance switches in microsystems.

Original languageEnglish
Title of host publicationASME 2013 Conference on Information Storage and Processing Systems, ISPS 2013
DOIs
StatePublished - 1 Dec 2013
EventASME 2013 Conference on Information Storage and Processing Systems, ISPS 2013 - Santa Clara, CA, United States
Duration: 24 Jun 201325 Jun 2013

Publication series

NameASME 2013 Conference on Information Storage and Processing Systems, ISPS 2013

Conference

ConferenceASME 2013 Conference on Information Storage and Processing Systems, ISPS 2013
CountryUnited States
CitySanta Clara, CA
Period24/06/1325/06/13

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  • Cite this

    Yang, J., Tan, C. P., Chong, N. B., & Lau, G. K. (2013). Rotary silicon polymeric composite thermal micro-actuator. In ASME 2013 Conference on Information Storage and Processing Systems, ISPS 2013 [V001T02A002] (ASME 2013 Conference on Information Storage and Processing Systems, ISPS 2013). https://doi.org/10.1115/ISPS2013-2891