Room-temperature oxidation of Ni, Pd, and Pt silicides

A. Cros*, R. A. Pollak, King-Ning Tu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

The room-temperature oxidation of Ni, Pd, and Pt silicides has been studied using electron spectroscopy for chemical analysis. It has been found that (1) Si atoms oxidize predominantly, (2) the oxidation of Si is enhanced in the metal-rich silicides, and (3) the growth of the surface oxide layer leaves behind a phase enriched with metal.

Original languageEnglish
Pages (from-to)2253-2257
Number of pages5
JournalJournal of Applied Physics
Volume57
Issue number6
DOIs
StatePublished - 1 Dec 1985

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