Role of an intermediate phase (Ba,Sr)2Ti2O5CO3 in doped (Ba0.7Sr0.3)TiO3 thin films

San-Yuan Chen, Hong Wen Wang*, Li Chi Huang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

14 Scopus citations


(Ba0.7Sr0.3)TiO3(BST) thin films doped with La, Nb, and Mg ions were prepared by metal-organic deposition method (MOD) on Pt/Ti/SiO2/Si substrates. An intermediate phase formed under an annealing temperature of 550-650°C, and disappeared at higher temperatures during the formation of BST. The intermediate phase was analyzed by X-ray diffraction (XRD) analysis, transmission electron microscopy (TEM), Fourier transform-infrared spectroscopy (FT-IR) and Raman spectra and found to be an oxycarbonate with a chemical formula of (Ba,Sr)2Ti2O5CO3. The stability of this intermediate phase increased with the addition of dopants, irrespective of doping types. It is proposed that distortion of crystal structure, physical constraint in the two-dimensions and small grain size favor the existence of poor crystallized (Ba,Sr)2Ti2O5CO3.

Original languageEnglish
Pages (from-to)632-638
Number of pages7
JournalMaterials Chemistry and Physics
Issue number3
StatePublished - 30 Jan 2003


  • (Ba,Sr)TiOCO
  • BST thin film
  • Intermediate phase
  • MOD

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