RHEED intensity oscillations in homoepitaxial growth of SrTiO3 films

J. Y. Lee*, Jenh-Yih Juang, J. H. Ou, Yung-Fu Chen, Kaung-Hsiung Wu, T. M. Uen, Y. S. Gou

*Corresponding author for this work

Research output: Contribution to journalArticle

7 Scopus citations


The amplitude and periodicity of the reflection high-energy electron diffraction (RHEED) oscillations displayed strong temperature dependence in homoepitaxy of SrTiO3(STO) films. Combining with the AFM observations, the results suggest that the oscillations are not directly related to the layer-by-layer growth.

Original languageEnglish
Pages (from-to)2099-2100
Number of pages2
JournalPhysica B: Condensed Matter
Issue numberPART II
StatePublished - 1 Jan 2000


  • Atomic force microscopy
  • Epitaxial growth
  • Homoepitaxial SrTiO thin film

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