Resistive switching behavior of sol-gel deposited TiO2 thin films under different heating ambience

Chun Hung Lai*, Chia Hung Chen, Tseung-Yuen Tseng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

We prepared anatase TiO2 films by sol-gel method under three thermal firing conditions to investigate the bipolar resistive switching (BRS) and unipolar resistive switching (URS) in Ag/TiO2/Pt structure. The devices are URS in an air atmosphere at 760Torr, while those in an oxygen ambience at 1Torr show BRS accompanying with forming-free and self-compliance. By examining the X-ray photoelectron spectroscopy (XPS) spectrum, different non-lattice oxygen content is observed. High concentration of oxygen vacancy is expected under oxygen-deficient treatment, and that would determine the electrode/oxide interface property and induce switching mode of polarity dependent or not. An improved performance of operation voltage dispersion down to 0.5V and endurance up to 3000cycles is obtained for those in reducing Ar.

Original languageEnglish
Pages (from-to)399-402
Number of pages4
JournalSurface and Coatings Technology
Volume231
DOIs
StatePublished - 25 Sep 2013

Keywords

  • Anatase
  • Resistive switching
  • Sol-gel
  • XPS

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