Research of transfer technique of high-quality aluminum thin-film for bio-sensing

Kow-Ming Chang, Yi Ming Chen, Kuang Jen Lai*, Yu Xin Zhang, Chiung Hui Lai, Yi Lung Lai, Hui Lung Lai, Fu Ching Lee, Chih Hai Fan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The most common way in plasmonic bio-sensing is based on the angular modulation of surface plasmon resonance (SPR) combined with fluorescence spectroscopy. When the bio-molecules or nanoparticles attach on the metal film and change the resonant condition, we can detect the existence of specific bio-molecules by analyzing the change of optical properties. In the article, we introduce the transfer technique of ultra-smooth single-crystalline aluminum thin-film and may be applied as a sensor chip for the non-invasive plasmonic bio-molecular sensing. We report on the transfer result of high quality and ultra-smooth aluminum thin-film transferred onto an optical cover glass with root-mean-square roughness of 0.474nm The transfer technique is based on the designed multi-epitaxial structures of Al, GaAs, AlGaAs, and GaAs substrate. Also, we use the properties of selective etching of citric acid and HF solutions for GaAs and AlGaAs.

Original languageEnglish
Title of host publicationAdvanced Manufacturing, Electronics and Microsystems - TechConnect Briefs 2016
EditorsBart Romanowicz, Matthew Laudon, Fiona Case, Fiona Case, Bart Romanowicz
PublisherTechConnect
Pages225-228
Number of pages4
ISBN (Electronic)9780997511734
StatePublished - 1 Jan 2016
Event10th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 19th Annual Nanotech Conference and Expo, and the 2016 National SBIR/STTR Conference - Washington, United States
Duration: 22 May 201625 May 2016

Publication series

NameAdvanced Materials - TechConnect Briefs 2016
Volume4

Conference

Conference10th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 19th Annual Nanotech Conference and Expo, and the 2016 National SBIR/STTR Conference
CountryUnited States
CityWashington
Period22/05/1625/05/16

Keywords

  • Aluminum thin-film
  • Biosensing
  • Plasmonic
  • Transfer

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