@inproceedings{38d206e2b77a4e3da0eec5e0e29e2d68,
title = "Research of transfer technique of high-quality aluminum thin-film for bio-sensing",
abstract = "The most common way in plasmonic bio-sensing is based on the angular modulation of surface plasmon resonance (SPR) combined with fluorescence spectroscopy. When the bio-molecules or nanoparticles attach on the metal film and change the resonant condition, we can detect the existence of specific bio-molecules by analyzing the change of optical properties. In the article, we introduce the transfer technique of ultra-smooth single-crystalline aluminum thin-film and may be applied as a sensor chip for the non-invasive plasmonic bio-molecular sensing. We report on the transfer result of high quality and ultra-smooth aluminum thin-film transferred onto an optical cover glass with root-mean-square roughness of 0.474nm The transfer technique is based on the designed multi-epitaxial structures of Al, GaAs, AlGaAs, and GaAs substrate. Also, we use the properties of selective etching of citric acid and HF solutions for GaAs and AlGaAs.",
keywords = "Aluminum thin-film, Biosensing, Plasmonic, Transfer",
author = "Kow-Ming Chang and Chen, {Yi Ming} and Lai, {Kuang Jen} and Zhang, {Yu Xin} and Lai, {Chiung Hui} and Lai, {Yi Lung} and Lai, {Hui Lung} and Lee, {Fu Ching} and Fan, {Chih Hai}",
year = "2016",
month = jan,
day = "1",
language = "English",
series = "Advanced Materials - TechConnect Briefs 2016",
publisher = "TechConnect",
pages = "225--228",
editor = "Bart Romanowicz and Matthew Laudon and Fiona Case and Fiona Case and Bart Romanowicz",
booktitle = "Advanced Manufacturing, Electronics and Microsystems - TechConnect Briefs 2016",
note = "null ; Conference date: 22-05-2016 Through 25-05-2016",
}