Reliable metal-to-metal oxide antifuses

G. Zhang*, Chen-Ming Hu, P. Yu, S. Chiang, S. Eltoukhy, E. Hamdy

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

8 Scopus citations


This paper presents a new high performance, reliable metal-to-metal antifuse. The problem of switch-off in the programmed antifuses is avoided by using metals with low thermal conductivity and thin oxide.

Original languageEnglish
Pages (from-to)281-284
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
StatePublished - 1 Dec 1994
EventProceedings of the 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA
Duration: 11 Dec 199414 Dec 1994

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