Reliability study of high-κ La₂O₃/HfO₂ and HfO₂/La₂O₃ stacking layers on n-In_0.53Ga_0.47As metal-oxide-semiconductor capacitor

Chung Ming Chu, Yueh Chin Lin, Wei-I Lee, Chang Fu Dee, Yuen Yee Wong, Burhanuddin Yeop Majlis, Muhamad Mat Salleh, Seong Ling Yap, Edward Yi Chang

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

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