Reliability study of high-κ La2O3/HfO2 and HfO2/La2O3 stacking layers on n-In0.53Ga0.47As metal-oxide-semiconductor capacitor

Chung Ming Chu, Yueh Chin Lin, Wei-I Lee, Chang Fu Dee, Yuen Yee Wong, Burhanuddin Yeop Majlis, Muhamad Mat Salleh, Seong Ling Yap, Edward Yi Chang

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Fingerprint Dive into the research topics of 'Reliability study of high-κ La<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> and HfO<sub>2</sub>/La<sub>2</sub>O<sub>3</sub> stacking layers on n-In<sub>0.53</sub>Ga<sub>0.47</sub>As metal-oxide-semiconductor capacitor'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy