Reliability and commercialization of oxidized VCSEL

Alice C.F. Li*, J. S. Pan, H. C. Lai, B. L. Lee, J. H. Wu, Y. S. Lin, T. C. Huo, C. C. Wu, Kai-Feng Huang

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


The reliability of oxidized VCSEL has similar result to implanted VCSEL. This paper presents our work on reliability data of oxidized VCSEL device and also the comparison with implanted VCSEL. The MTTF of oxidized VCSEL is 2.73 × 106 hrs at 55 °C, 6 mA and failure rate ∼ 1 FITs for the first 2 years operation. The reliability data of oxidized VCSEL includes activation energy, MTTF (mean-time-to failure), failure rate prediction, and 85°C / 85% humidity test will be presented below. Commercialization of oxidized VCSEL is demonstrated such as VCSEL structure, manufacturing facility, and packaging. A cost effective approach is key to its success in applications such as Datacomm.

Original languageEnglish
Pages (from-to)12-20
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 29 Sep 2003
EventVertical-Cavity Surface-Emitting Lasers VII - San Jose, CA, United States
Duration: 29 Jan 200330 Jan 2003


  • Implantation
  • Oxidation
  • Reliability

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