Relationship between mobility and residual-mechanical-stress as measured by Raman spectroscopy for nitrided-oxide-gate MOSFETs

Hisayo Sasaki Momose*, Toyota Morimoto, Kikuo Yamabe, Hiroshi Iwai

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

35 Scopus citations

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Physics & Astronomy

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