Recessed metal/silicon contact resistance measured by the cross-bridge-kelvin resistor structure-Numerical analysis

Bing-Yue Tsui, Mao Chieh Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations
Original languageEnglish
Title of host publicationSMS 1993 Technical Digest - 1993 Symposium on Semiconductor Modeling and Simulation
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages99-100
Number of pages2
ISBN (Electronic)0780312252, 9780780312258
DOIs
StatePublished - 1 Jan 1993
Event1993 Symposium on Semiconductor Modeling and Simulation, SMS 1993 - Taipei, Taiwan
Duration: 6 Mar 19937 Mar 1993

Publication series

NameSMS 1993 Technical Digest - 1993 Symposium on Semiconductor Modeling and Simulation

Conference

Conference1993 Symposium on Semiconductor Modeling and Simulation, SMS 1993
CountryTaiwan
CityTaipei
Period6/03/937/03/93

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