Realization and manipulation of ZnO nanorod arrays on sapphire substrates using a catalyst-free metalorganic chemical vapor deposition technique

C. C. Wu, D. S. Wuu, P. R. Lin, T. N. Chen, Ray-Hua Horng

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

Single-crystalline ZnO nanorod arrays (ZNRs) were grown by metalorganic chemical vapor deposition on ZnO buffer/sapphire substrate without using any metal catalyst. The density of vertically aligned ZNRs was found to govern by the morphology and thickness of buffer layer. That is to say, the ZnO buffer layer can be used as the nucleation template to control the growth direction and density of the ZNRs. In addition, by controlling the diethyl zinc flow rate, we can manipulate the size, crystal, and optical quality of ZNRs. Finally, the possible growth mechanism of ZNRs was discussed in detail.

Original languageEnglish
Pages (from-to)3001-3011
Number of pages11
JournalJournal of Nanoscience and Nanotechnology
Volume10
Issue number5
DOIs
StatePublished - 1 May 2010

Keywords

  • Buffer layer
  • Density
  • Growth mechanism
  • Metalorganic chemical vapor deposition
  • Size
  • ZnO nanorod arrays

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