Reactive ion etching of ZnO using a Cl2/Ar mixture

K. P. Hsueh, R. J. Hou, Cheng-Huang Kuo, C. J. Tun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This study investigates physical properties of ZnO films after reactive ions etching (RIE) using a Cl2Ar mixture by varying the gas flow ratio, radio-frequency (rf) plasma power and chamber pressure. Atomic force microscopy (AFM) results and surface topographies are discussed. The etching rate at a Cl2/Ar flow rate of 150/10 sccm, a work pressure of 60 m Torr and an rf power of 300 W is higher than under any other conditions. Additionally, the root-mean-square (rms) roughness of 24.20 nm is the highest at a Cl2/Ar flow rate of 150/10 sccm, a work pressure of 190 mTorr and an rf power of 300 W; it is suitable for roughened transparent contact layer (TCL) in light-emitting diodes (LED5). Bearing ratio analysis reveals that, under this condition, the nanorods covered 25.41 % of the total surface area and their maximum height was approximately 150.83 nm.

Original languageEnglish
Title of host publicationECS Transactions - ZnO Based Thin Films, Nano-Wires, and Nano-Belts for Photonic and Electronic Devices and Sensors
PublisherElectrochemical Society Inc.
Pages95-101
Number of pages7
Edition12
ISBN (Print)9781566776585
DOIs
StatePublished - 1 Jan 2008
EventZnO Based Thin Films, Nano-Wires, and Nano-Belts for Photonic and Electronic Devices and Sensors - 214th ECS Meeting - Honolulu, HI, United States
Duration: 12 Oct 200817 Oct 2008

Publication series

NameECS Transactions
Number12
Volume16
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

ConferenceZnO Based Thin Films, Nano-Wires, and Nano-Belts for Photonic and Electronic Devices and Sensors - 214th ECS Meeting
CountryUnited States
CityHonolulu, HI
Period12/10/0817/10/08

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    Hsueh, K. P., Hou, R. J., Kuo, C-H., & Tun, C. J. (2008). Reactive ion etching of ZnO using a Cl2/Ar mixture. In ECS Transactions - ZnO Based Thin Films, Nano-Wires, and Nano-Belts for Photonic and Electronic Devices and Sensors (12 ed., pp. 95-101). (ECS Transactions; Vol. 16, No. 12). Electrochemical Society Inc.. https://doi.org/10.1149/1.2985848