TY - JOUR
T1 - Rapid synthesis of piezoelectric ZnO-nanostructures for micro power-generators
AU - Hsu, Nai Feng
AU - Chung, Tien-Kan
AU - Chang, Ming
AU - Chen, Hong Jun
PY - 2013/10/1
Y1 - 2013/10/1
N2 - In this paper, we report a rapid synthesis of piezoelectric ZnO-nanostructures and fabrication of the nanostructures-based power-generators demonstrating an energy conversion from an environmental mechanical/ultrasonic energy to an electrical energy. The ZnO nanostructures are grown on a silicon wafer by a modified chemical solution method (CSD, chemical-solution-deposition) with a two-step thermal-oxidation approach. The synthesis process can be completed within 1h. By varying the mixture-ratio of Zn micro-particles in an oxalic acid solution with 0.75mol/l concentration in the CSD process, the growth mechanism is well-controlled to synthesize three different types of ZnO-nanostructures (i.e., dandelion-like nanostructures, columnar nanostructures, and nanowires). Furthermore, through oxidizing at different temperatures in the thermal-oxidation process, the featured geometry of the nanostructures (e.g., the length and diameter of a nanowire) is modified. The geometry, size, morphology, crystallization, and material phase of the modified nanostructures are characterized by scanning electron microscopy and X-ray diffraction. Finally, the nanostructures are used to fabricate several micro power-generators. Through the piezoelectric effect, a maximum current density output of 0.28μAcm-2 generated by a power-generator under an ultrasonic wave is observed.
AB - In this paper, we report a rapid synthesis of piezoelectric ZnO-nanostructures and fabrication of the nanostructures-based power-generators demonstrating an energy conversion from an environmental mechanical/ultrasonic energy to an electrical energy. The ZnO nanostructures are grown on a silicon wafer by a modified chemical solution method (CSD, chemical-solution-deposition) with a two-step thermal-oxidation approach. The synthesis process can be completed within 1h. By varying the mixture-ratio of Zn micro-particles in an oxalic acid solution with 0.75mol/l concentration in the CSD process, the growth mechanism is well-controlled to synthesize three different types of ZnO-nanostructures (i.e., dandelion-like nanostructures, columnar nanostructures, and nanowires). Furthermore, through oxidizing at different temperatures in the thermal-oxidation process, the featured geometry of the nanostructures (e.g., the length and diameter of a nanowire) is modified. The geometry, size, morphology, crystallization, and material phase of the modified nanostructures are characterized by scanning electron microscopy and X-ray diffraction. Finally, the nanostructures are used to fabricate several micro power-generators. Through the piezoelectric effect, a maximum current density output of 0.28μAcm-2 generated by a power-generator under an ultrasonic wave is observed.
KW - Chemical solution method
KW - Piezoelectric ZnO nanostructures
KW - Power-generator
KW - Thermal-oxidation
UR - http://www.scopus.com/inward/record.url?scp=84883453284&partnerID=8YFLogxK
U2 - 10.1016/j.jmst.2013.07.005
DO - 10.1016/j.jmst.2013.07.005
M3 - Article
AN - SCOPUS:84883453284
VL - 29
SP - 893
EP - 897
JO - Journal of Materials Science and Technology
JF - Journal of Materials Science and Technology
SN - 1005-0302
IS - 10
ER -