Rapid pdms-glass bonding using argon plasma jet towards automatic chip fabrication

Shih Chi Chuang, Chia Hung Dylan Tsai*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This paper reports a rapid PDMS-Glass bonding method with an atmospheric pressure plasma jet (APPJ). The jet is mounted on a 3D plotter for applying plasma along a specified path on a target PDMS chip and slide glass. After the treatment, the chip and glass are stacking together, and strong covalent bonding between them would be formed within 2 seconds. Experimental results show a very interesting result that bonding strength is not always improved with the increases of plasma dose.

Original languageEnglish
Title of host publication23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019
PublisherChemical and Biological Microsystems Society
Pages1080-1081
Number of pages2
ISBN (Electronic)9781733419000
StatePublished - 2019
Event23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019 - Basel, Switzerland
Duration: 27 Oct 201931 Oct 2019

Publication series

Name23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019

Conference

Conference23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019
CountrySwitzerland
CityBasel
Period27/10/1931/10/19

Keywords

  • Atmospheric pressure plasma jet
  • Evaluation of bonding strength
  • Plasma bonding

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