Rapid fabrication of high quality self-assembled nanometer gold particles by spin coating method

Fu Ken Liu*, Yu Cheng Chang, Fu-Hsiang Ko, Tieh Chi Chu, Bau Tong Dai

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

56 Scopus citations

Abstract

This paper reports the fabrication of self-assembled gold nanoparticles attached to 3-aminopropyltrimethoxysilane (APTMS) modified fused silica substrates by the spin coating method. With the spin coating method, the gold nanoparticles can be fabricated on fused silica substrates with highly packing density in a short processing time. Our results clearly demonstrate that the spin coating method takes advantages of shorter fabrication time, higher uniformity, and better reproducibility when compared with the traditional immersion method.

Original languageEnglish
Pages (from-to)702-709
Number of pages8
JournalMicroelectronic Engineering
Volume67-68
DOIs
StatePublished - 1 Jun 2003
EventProceedings of the 28th International Conference on MNE - Lugano, Switzerland
Duration: 16 Sep 200219 Sep 2002

Keywords

  • Gold nanoparticles
  • Rapid fabrication
  • Self-assembled
  • Spin coating

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