Rapid and accurate extraction of optical parameters for uniaxial bulk media by phase modulated ellipsometry

Chun I. Chuang, Shiuan-Huei Lin, Yu Faye Chao*

*Corresponding author for this work

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

An improved phase modulated technique has been implemented to increase the speed and accuracy of optical parameters extraction for a uniaxial bulk media. In combination of the genetic algorithm, we show that not only the complex refractive indices, the inclination and azimuth angles of optical axis can also be extracted. Furthermore, by using a two-probe-beam configuration, the speed of convergence can be improved by 5-times. Such a high speed and accurate method can be applied for the in-situ measurement of dynamic materials.

Original languageEnglish
Pages (from-to)861-866
Number of pages6
JournalOptics and Lasers in Engineering
Volume51
Issue number7
DOIs
StatePublished - 1 Jul 2013

Keywords

  • Genetic algorithm
  • Orientation of optical axis
  • Phase modulated ellipsometry
  • Refractive index
  • Uniaxial

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