Pulsed laser deposition of hexagonal GaN-on-Si(100) template for MOCVD applications

Kun Ching Shen, Ming Chien Jiang, Hong Ru Liu, Hsu Hung Hsueh, Yu Cheng Kao, Ray-Hua Horng, Dong Sing Wuu

Research output: Contribution to journalArticlepeer-review

22 Scopus citations


Growth of hexagonal GaN on Si(100) templates via pulsed laser deposition (PLD) was investigated for the further development of GaN-on-Si technology. The evolution of the GaN growth mechanism at various growth times was monitored by SEM and TEM, which indicated that the GaN growth mode changes gradually from island growth to layer growth as the growth time increases up to 2 hours. Moreover, the high-temperature operation (1000°C) of the PLD meant no significant GaN meltback occurred on the GaN template surface. The completed GaN templates were subjected to MOCVD treatment to regrow a GaN layer. The results of X-ray diffraction analysis and photoluminescence measurements show not only the reliability of the GaN template, but also the promise of the PLD technique for the development of GaN-on-Si technology.

Original languageEnglish
Pages (from-to)26468-26474
Number of pages7
JournalOptics Express
Issue number22
StatePublished - 4 Nov 2013

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