Production of amorphous tin oxide thin films and microstructural transformation induced by heat treatment

Z. W. Chen*, J. K.L. Lai, C. H. Shek, Haydn Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

X-ray diffraction, scanning electron microscopy, transmission electron microscopy, and high resolution transmission electron microscopy were used to study tin oxide thin films deposited on Si(100) substrates at room temperature using pulsed laser deposition techniques with a sintered cassiterite SnO 2 target and subsequently heat-treated. X-ray diffraction and scanning electron microscopy results demonstrated that the as-prepared thin films consisted of an amorphous matrix as well as plume-like features, which are shown many micropores. The thin films that were heat treated for 2 h at 150 °C had tetragonal rutile nanocrystalline SnO2 structures. The microstructural evolution of the tin oxide thin films during the heat treatment is discussed in the paper.

Original languageEnglish
Pages (from-to)1073-1076
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Volume81
Issue number5
DOIs
StatePublished - 1 Oct 2005

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