Probing Long-Range Coulomb Interactions in Nanoscale MOSFETs

Ming-Jer Chen, Li Ming Chang, Sih-Yun Wei, Wan-Li Chen, Ting-Hsien Yeh, Yu-Chiao Liao, Chuan-Li Chen

Research output: Contribution to journalArticle

5 Scopus citations

Abstract

We have recently experimentally probed long-range Coulomb interactions due to plasmons in polysilicon gate of long-channel (1 mu m) MOSFETs. In this letter, we further probe those due to plasmons in the highly doped source and drain. Test vehicles include four more samples from the same manufacturing process but with small channel lengths (down to 33 nm). I-V's of devices are measured at two drain voltages of 0.05 and 1 V, in a temperature range of 292-380 K. Inverse modeling technique is applied to furnish calibrated doping profiles. The inversion layer electron effective mobility is thereby extracted, showing a decreasing trend with decreasing channel length. Such differences reflect more additional scatterers in the shorter devices. Mobility components limited by these additional scatterers are assessed using Matthiessen's rule. From the extracted temperature dependencies, we infer that the strength of source/drain plasmons increases with decreasing channel length. The errors of Matthiessen's rule are adequately dealt with. Corroborative evidence is given as well.
Original languageEnglish
Pages (from-to)1563-1565
Number of pages3
JournalIEEE Electron Device Letters
Volume34
Issue number12
DOIs
StatePublished - Dec 2013

Keywords

  • Device physics; long-range Coulomb; MOSFETs; mobility; plasmons; scaling; scattering; transport
  • SMALL SI DEVICES; ELECTRON-MOBILITY; SURFACE-ROUGHNESS; PART II; TRANSPORT; EXTRACTION; SCATTERING; NMOSFETS; RULE

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    Chen, M-J., Chang, L. M., Wei, S-Y., Chen, W-L., Yeh, T-H., Liao, Y-C., & Chen, C-L. (2013). Probing Long-Range Coulomb Interactions in Nanoscale MOSFETs. IEEE Electron Device Letters, 34(12), 1563-1565. https://doi.org/10.1109/LED.2013.2286816