Prioritization of key in-line process parameters for electrical characteristic optimization of high-k metal gate bulk FinFET devices

Ping Husn Su, Yi-ming Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work reports a novel method to discovery and optimize key fabrication in-line process of 16-nm HKMG bulk FinFET to improve device's performance and variability. The sensitivity analysis is utilized to prioritize key in-line process parameters which significantly boost device's performance and effectively reduce its variations. To extract hidden correlations among complex and a large number of in-line process parameters, data mining technique is applied to highlight and group associated in-line process parameters. The source of variations of in-line process parameters in each group is revealed and the optimized solution is proposed to reduce its sensitivity to devices' fluctuation. Results show the dual gate-spacer, the source/drain (S/D) proximity, the S/D depth, and the S/D implant are grouped to the same cluster and significantly affect the threshold voltage (Vt,sat), the on-state current (Id,sat) and the off-state current (Id,off), but the key variation source of these parameters is the thickness of the dual gate-spacer. By replacing dual spacers with single spacers, the fluctuation of threshold voltage is 30% dropped.

Original languageEnglish
Title of host publicatione-Manufacturing and Design Collaboration Symposium 2016, eMDC 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9789869171526
StatePublished - 20 Oct 2016
Event2016 e-Manufacturing and Design Collaboration Symposium, eMDC 2016 - Hsinchu, Taiwan
Duration: 9 Sep 2016 → …

Publication series

Namee-Manufacturing and Design Collaboration Symposium 2016, eMDC 2016 - Proceedings

Conference

Conference2016 e-Manufacturing and Design Collaboration Symposium, eMDC 2016
CountryTaiwan
CityHsinchu
Period9/09/16 → …

Keywords

  • Bulk FinFET
  • Characteristics fluctuation
  • Inline process parameters
  • Optimization
  • Sensitivity analysis

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