Preparation and phase transformation of highly ordered TiO2 nanodot arrays on sapphire substrates

Po Lin Chen*, Cheng Tzu Kuo, Fu-Ming Pan, Tzeng Guang Tsai

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

41 Scopus citations

Abstract

The highly ordered TiO2 nanodots with uniform shape on a sapphire substrate by anodization of an epitaxial Al/TiN film stack was studied. The nanodots of about 60nm with a hexagonal dot array pattern conformed to the upper nanoporous anodic aluminum oxide (AAO) layer. It was found that the phase development of the isolated TiO2 nanodots was different from TiO 2 thin films and powders. The results show that the nanodots were polycrystalline and consists of mixed phase of anatase and rutile instead of single rutile phase.

Original languageEnglish
Pages (from-to)3888-3890
Number of pages3
JournalApplied Physics Letters
Volume84
Issue number19
DOIs
StatePublished - 10 May 2004

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