Preparation and electrical properties of (100) Preferred (Ba,Sr)TiO 3 bilayer thin films derived from pulse laser deposition method

S. G. Lu, Philip A. Friddle, Z. K. Xu, G. G. Siu, Haydn Chen*, K. H. Wong, C. L. Mak

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

Bilayer Ba0.6Sr0.4TiO3 - Ba 0.4Sr0.6TiO3 and Ba0.4Sr 0.6TiO3 - Ba0.6Sr0.4TiO3 thin films were deposited on the LaNiO3-buffered Pt/Ti/SiO 2/Si substrates using pulse laser deposition method. A (100) preferred orientation was obtained. The structure was characterized using x-ray diffraction (XRD) and Raman spectroscopy. The leakage current, and dielectric permittivity versus temperature were characterized. Results indicated that the (100) preferred bilayer structure had less leakage current and smaller loss tangent, which was in favor of enhancing the quality of thin film used as microwave dielectrics.

Original languageEnglish
Pages (from-to)849-852
Number of pages4
JournalKey Engineering Materials
Volume280-283
Issue numberI
DOIs
StatePublished - 1 Dec 2005

Keywords

  • Barium strontium titanate
  • Preferred orientation
  • Pulse laser deposition
  • Thin film

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