Preparation and characterization of some tin oxide films

T. M. Uen*, Kai-Feng Huang, M. S. Chen, Y. S. Gou

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

35 Scopus citations

Abstract

Tin oxide films were successfully prepared by the reactive evaporation method with a d.c. glow discharge of oxygen. The structure and composition of the films were characterized by Mössbauer spectroscopy, X-ray diffraction and scanning electron microscopy. The valency of tin atoms in the films determined by Mössbauer spectroscopy is mostly divalent in the samples prepared without discharge, but mostly tetravalent in the samples prepared with discharge. Measurements of electrical conductivity and Hall mobility were also carried out and the data were found to correlate with the concentration ratio [Sn4+]/[Sn2+] determined from Mössbauer spectroscopy.

Original languageEnglish
Pages (from-to)69-80
Number of pages12
JournalThin Solid Films
Volume158
Issue number1
DOIs
StatePublished - 1 Jan 1988

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