Preface

J. Murota, C. Claeys, H. Iwai, M. Tao, S. Deleonibus, A. Mai, K. Shiojima, Y. Cao

Research output: Contribution to journal › Editorial

1 Scopus citations

Original language	English
Pages (from-to)	3
Number of pages	1
Journal	ECS Transactions
Volume	92
Issue number	4
DOIs	https://doi.org/10.1149/09204.0003ecst
State	Published - 2019
Event	11th Symposium on Semiconductor Process Integration - 236th ECS Meeting - Atlanta, United States Duration: 13 Oct 2019 → 17 Oct 2019

Access to Document

@article{d559ec7bd29c4fb7b82599f0c4dfb8ec,

title = "Preface",

author = "J. Murota and C. Claeys and H. Iwai and M. Tao and S. Deleonibus and A. Mai and K. Shiojima and Y. Cao",

year = "2019",

doi = "10.1149/09204.0003ecst",

language = "English",

volume = "92",

pages = "3",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "4",

note = "null ; Conference date: 13-10-2019 Through 17-10-2019",

}

TY - JOUR

T1 - Preface

AU - Murota, J.

AU - Claeys, C.

AU - Iwai, H.

AU - Tao, M.

AU - Deleonibus, S.

AU - Mai, A.

AU - Shiojima, K.

AU - Cao, Y.

PY - 2019

Y1 - 2019

UR - http://www.scopus.com/inward/record.url?scp=85076998195&partnerID=8YFLogxK

U2 - 10.1149/09204.0003ecst

DO - 10.1149/09204.0003ecst

M3 - Editorial

AN - SCOPUS:85076998195

VL - 92

SP - 3

JO - ECS Transactions

JF - ECS Transactions

SN - 1938-5862

IS - 4

Y2 - 13 October 2019 through 17 October 2019

ER -