This study performs precision positioning of a generic piezoelectric structure against hysteresis effects by the robust control design based on a microscopic hysteresis model. This microscopic hysteresis model was developed essentially to characterize the general hysteresis effects of a piezo-structure at a microscopic level, which requires no additional identification of the hysteresis effects once the microscopic model is established. This is accomplished by adding a polarization term into the linear constitutive equations of piezoelectric materials. The polarization term is then described by the well-known hysteresis model, Preisach model. Applying basic principles of finite elements and Lagrange's equations, the macroscopic governing equations of an arbitrary piezoelectric system infinite elements can be obtained. Based on the model, a controller consisting of two parts is designed to perform the precision positioning of a generic piezo-structure. The first part is responsible for a direct cancellation of the hysteresis term at the microscopic level, while the second one is a robust H ∞ controller responsible for overcoming the imprecision of the microscopic hysteresis modeling. In this way, the control effort is then more energy-economic than without microscopic hysteresis cancellation. A simple piezoelectric structure of bender-bimorph cantilever beam is considered for designs and experimental validation. Based on experimental results, the designed H ∞controller is found effective to suppress hysteresis effects and achieve excellent precision positioning.