Precisely rectilinear electro-thermal microactuator using a high-aspect ratio microstructured Si/SU-8 composite

Borriboon Thubthimthong*, Gih Keong Lau, Chong Nyok Boon, Murukeshan Vadakke Matham

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

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Chemical Compounds

Engineering & Materials Science