Power efficient V-shape electro-thermal actuator using constrained SU-8

Gih Keong Lau, T. Chu DuC., J. F.L. Goosen, P. M. Sarro, F. Van Keulen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Abstract

This paper presents the design, simulation and characterization of a V-shape thermal actuator, which incorporates silicon/SU-8 composite. The design exploits the confined SU-8 layers in the composite for effective thermal actuation. The micro-fabricated actuator (1000-μm long, 56-μm wide, 60-μm high, 15° bent) demonstrates a large in-plane motion (10 μm) at a 1.75-V driving voltage, consuming low power (16 mW) and operating at a relatively low temperature (125 °C). It is estimated to produce a blocked apex force of 100 mN at 1.75 V.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages287-290
Number of pages4
DOIs
StatePublished - 1 Dec 2007
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 10 Jun 200714 Jun 2007

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period10/06/0714/06/07

Keywords

  • Micro-actuators
  • Polymeric composite
  • SU-8
  • Thermal actuator

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    Lau, G. K., DuC., T. C., Goosen, J. F. L., Sarro, P. M., & Van Keulen, F. (2007). Power efficient V-shape electro-thermal actuator using constrained SU-8. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 287-290). [4300125] (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300125