Power and reliability improvement of an electro-thermal microactuator using Ni-diamond nanocomposite

Li Nuan Tsai*, Guang Ren Shen, Yu-Ting Cheng, Wen-Syang Hsu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

10 Scopus citations

Abstract

Here a low-temperature stress-free electrolytic nickel (EL) deposition process with the addition of uniformly dispersed diamond nanoparticles (diameter < 0.5 μm) is proposed to fabricate cantilevers and electro-thermal microactuators to demonstrate the improvement of the device on reducing input power requirement and enhancing operation reliability. The fabrication results show that the nanodiamond particles are successfully dispersed in the electroplating nickel layers. By calibrating the resonant frequencies of nickel cantilevers with different concentrations of diamond nanoparticles, the E/pratio of cantilevers can be enhanced 7.1 times with diamond nanoparticles of 2 g/l in the proposed electrolytic nickel (EL) deposition process. From displacement tests, the electro-thermal microactuator with nanodiamond particles of 2 g/l reduces 73% power requirement of pure nickel device needed at the same output displacement of 3 urn. Also, the reversible displacement range is found to be expanded from 1.8 μm to 3 μm by adding nanodiamond particles of 2 g/l in the nickel electro-thermal microactuators.

Original languageEnglish
Pages (from-to)472-476
Number of pages5
JournalProceedings - Electronic Components and Technology Conference
Volume1
DOIs
StatePublished - 27 Dec 2004
Event2004 Proceedings - 54th Electronic Components and Technology Conference - Las Vegas, NV, United States
Duration: 1 Jun 20044 Jun 2004

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