Porous materials with ultra-low optical constants for integrated optical devices applications

H. L. Chen*, C. P. Chang, C. C. Cheng, C. I. Hsieh, W. S. Wang, Po-Tsun Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The optical characteristics such as, ultra-low optical constants, for porous MSQ films, and epoxy based SU-8 resist were investigated for integrated optical devices applications. The refractive index of porous MSQ is found to decrease to around 1.320 as the hydration time exceed 24 hours. The measure refractive index is about 1.163 at 1550 nm wavelength. It is found that due to low refractive index and low absorption in the large spectra regimes, porous MSQ films would be cladding materials.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
Pages180-181
Number of pages2
DOIs
StatePublished - 1 Dec 2004
Event2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
Duration: 26 Oct 200429 Oct 2004

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference2004 International Microprocesses and Nanotechnology Conference
CountryJapan
CityOsaka
Period26/10/0429/10/04

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  • Cite this

    Chen, H. L., Chang, C. P., Cheng, C. C., Hsieh, C. I., Wang, W. S., & Liu, P-T. (2004). Porous materials with ultra-low optical constants for integrated optical devices applications. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 180-181). (Digest of Papers - Microprocesses and Nanotechnology 2004). https://doi.org/10.1109/IMNC.2004.245783