Polymeric electro-optical channel waveguide fabricated by lithography and wet chemical etching

Kevin Le*, Ping Zhang, Po-Sheng Hu, J. C. Chiao

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Electro-optical channel waveguide is fabricated using an optical nonlinear polymer developed by doping dye organic molecules in a host polymer system and followed by an electric field poling step. A single-mode polymeric electrooptical channel waveguide is modeled using the Beam Prop. Photolithography followed by wet chemical etching is used to fabricate the polymeric channel waveguide. A fabrication process is described. Results from a systematic evaluation of the film and waveguide physical and optical properties using AFM, profilometer, ellipsometer and the Maker Fringe technique is presented.

Original languageEnglish
Title of host publicationPhotonics
Subtitle of host publicationDesign, Technology, and Packaging II
StatePublished - 17 Apr 2006
EventPhotonics: Design, Technology, and Packaging II - Brisbane, Australia
Duration: 12 Dec 200514 Dec 2005

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferencePhotonics: Design, Technology, and Packaging II


  • Nonlinear thin film
  • Nonlinear waveguide
  • Optical nonlinearity
  • Poled polymer

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