Polymer constraint effect for electrothermal bimorph microactuators

T. Chu Duc*, Gih Keong Lau, P. M. Sarro

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

The authors report on the analysis of the polymer constraint effect and its use for a micromachined electrothermal bimorph actuator. The actuated displacement is enhanced due to the polymer constraint effect. Both the thermal expansion and apparent Young's modulus of the constrained polymer blocks are significantly improved, compared with the no constraint case. The calculation that agrees well with experimental results provides the means to optimize the design of the constrained polymer stack electrothermal microactuator.

Original languageEnglish
Article number101902
JournalApplied Physics Letters
Volume91
Issue number10
DOIs
StatePublished - 13 Sep 2007

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