Plasma-made silicon nanograss and related nanostructures

Jiann Shieh*, Srikanth Ravipati, Fu-Hsiang Ko, Kostya Ostrikov

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

Abstract

Plasma-made nanostructures show outstanding potential for applications in nanotechnology. This paper provides a concise overview on the progress of plasma-based synthesis and applications of silicon nanograss and related nanostructures. The materials described here include black silicon, Si nanotips produced using a self-masking technique as well as self-organized silicon nanocones and nanograss. The distinctive features of the Si nanograss, two-tier hierarchical and tilted nanograss structures are discussed. Specific applications based on the unique features of the silicon nanograss are also presented.

Original languageEnglish
Article number174010
JournalJournal of Physics D: Applied Physics
Volume44
Issue number17
DOIs
StatePublished - 4 May 2011

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