Plasma-induced charging damage in ultrathin (3-nm) gate oxides

Chi Chun Chen, Horng-Chih Lin, Chun Yen Chang, Mong Song Liang, Chao-Hsin Chien, Szu Kang Hsien, Tiao Yuan Huang, Tien-Sheng Chao

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18 Scopus citations

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Chemical Compounds

Engineering & Materials Science