Plasma etching antenna effect on oxide-silicon interface reliability

Hyungcheol Shin*, Chen-Ming Hu

*Corresponding author for this work

Research output: Contribution to journalArticle

6 Scopus citations
Original languageEnglish
Pages (from-to)1356-1358
Number of pages3
JournalSolid State Electronics
Volume36
Issue number9
DOIs
StatePublished - 1 Jan 1993

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