Planar polysilicon TFT low-voltage flash memory cell with A1 2 O 3 tunnel dielectric and (Ti,Dy)0 control dielectric for three-dimensional integration

Jaegoo Lee*, Sara C. Barron, R. B. Van Dover, E. Kwame Amponsah, Tuo-Hung Hou, Hassan Raza, Edwin C. Kan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publication66th DRC Device Research Conference Digest, DRC 2008
Pages279-280
Number of pages2
DOIs
StatePublished - 1 Dec 2008
Event66th DRC Device Research Conference Digest, DRC 2008 - Santa Barbara, CA, United States
Duration: 23 Jun 200825 Jun 2008

Publication series

NameDevice Research Conference - Conference Digest, DRC
ISSN (Print)1548-3770

Conference

Conference66th DRC Device Research Conference Digest, DRC 2008
CountryUnited States
CitySanta Barbara, CA
Period23/06/0825/06/08

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