Physical properties of polycrystalline Cr-doped SnO 2 films grown on glasses using reactive dc magnetron co-sputtering technique

Shiu Jen Liu*, Liang Yu Chen, Chai Yun Liu, Hau Wei Fang, Jang Hsing Hsieh, Jenh-Yih Juang

*Corresponding author for this work

Research output: Contribution to journalArticle

21 Scopus citations

Abstract

Abstract: Electrical, optical and magnetic properties of polycrystalline Cr-doped SnO 2 films grown on glasses using reactive dc magnetron co-sputtering technique were investigated. The Cr content was modulated by varying the sputtering power applied on the Cr target. The carrier concentration and conductivity of doped films are reduced with increasing the Cr doping. Moreover, while the Cr content ratio Cr/(Sn + Cr) exceeds 0.9 at.%, the doped SnO 2 films become insulators and the optical transmission is strongly affected. The surface roughness of sputtered films is also increased by Cr doping. The co-sputtered Cr-doped SnO 2 films exhibit paramagnetic characteristics from room temperature down to 25 K.

Original languageEnglish
Pages (from-to)2254-2258
Number of pages5
JournalApplied Surface Science
Volume257
Issue number6
DOIs
StatePublished - 1 Jan 2011

Keywords

  • Co-sputtering technique
  • Optoelectronic properties
  • Paramagnetism

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