Photovoltaic effect on differential capacitance profiles of low-energy-BF2+-implanted silicon wafers

M. N. Chang*, C. Y. Chen, Fu-Ming Pan, J. H. Lai, W. W. Wan, J. H. Liang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

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Physics & Astronomy