Photovoltaic effect on differential capacitance profiles of low-energy-BF2+-implanted silicon wafers

M. N. Chang*, C. Y. Chen, Fu-Ming Pan, J. H. Lai, W. W. Wan, J. H. Liang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

The photovoltaic effect on differential capacitance signals of low-energy BF2+ implanted silicon wafers was studied using scanning capacitance microscopy (SCM). The observed junction image exhibited a narrower junction width due to the photovoltaic effect on the junction region. The photovoltaic effect deteriorates the accuracy of junction characterization, in particular for ultrashallow junctions and lower band-gap semiconductors.

Original languageEnglish
Pages (from-to)3955-3957
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number22
DOIs
StatePublished - 2 Jun 2003

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