Photonic crystal horizontally slotted nanobeam cavity for silicon-based nanolasers

Tsan Wen Lu, Pin Tso Lin, Po Tsung Lee*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

22 Scopus citations


We theoretically propose and investigate a TM-polarized one-dimensional photonic crystal nanocavity with a horizontal SiO 2 slot on a suspended silicon nanobeam via the three-dimensional finite-element method. The ultrahigh quality factor and ultrasmall effective mode volume of 1.5 × 10 7 and 0.176 half-wavelength cubic of the horizontally SiO 2 -slotted nanocavity show strong possibilities for realizing an erbium-doped SiO 2 nanolaser. This horizontal SiO 2 slot structure can be precisely formed via the sputtering process and further transformed into an air slot via selective wet etching for optical index and biomolecule sensing.

Original languageEnglish
Pages (from-to)569-571
Number of pages3
JournalOptics Letters
Issue number4
StatePublished - 15 Feb 2012

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