Phase separation in alloy-Si interaction

G. Ottaviani*, King-Ning Tu, J. W. Mayer, B. Y. Tsaur

*Corresponding author for this work

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Abstract

Phase separation has been found to be a general phenomenon among many alloy-Si interactions at temperatures as high as 800°C. We have studied these interactions with alloys consisting of a near-noble metal of Ni, Pd, and Pt, and a refractory metal of Cr, V, and W. The interaction produces a silicide of the near-noble metals next to the Si and an outer layer of silicide of the refractory metals. No evidence for ternary formation has been found.

Original languageEnglish
Pages (from-to)331-333
Number of pages3
JournalApplied Physics Letters
Volume36
Issue number4
DOIs
StatePublished - 1 Dec 1980

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    Ottaviani, G., Tu, K-N., Mayer, J. W., & Tsaur, B. Y. (1980). Phase separation in alloy-Si interaction. Applied Physics Letters, 36(4), 331-333. https://doi.org/10.1063/1.91482