Patterning periodical motif on substrates using monolayer of microspheres: Application in GaN light-emitting diodes

Chia Hua Chan*, Chia Hung Hou, Chih Kai Huang, Tsing Jen Chen, Shao Ze Tseng, Hung Ta Chien, Cheng-Huang Kuo, Kuo Huang Hsieh, Yen Ling Tsai, Kuei Chu Hsu, Chii Chang Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%.

Original languageEnglish
Article number020212
JournalJapanese journal of applied physics
Volume48
Issue number2
DOIs
StatePublished - 1 Feb 2009

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