Patterning crystalline indium tin oxide by high repetition rate femtosecond laser-induced crystallization

Chung-Wei Cheng*, Cen Y.Ing Lin, Wei Chih Shen, Yi Ju Lee, Jenq Shyong Chen

*Corresponding author for this work

Research output: Contribution to journalArticle

20 Scopus citations

Abstract

A method is proposed for patterning crystalline indium tin oxide (c-ITO) patterns on amorphous ITO (a-ITO) thin films by femtosecond laser irradiation at 80 MHz repetition rate followed by chemical etching. In the proposed approach, the a-ITO film is transformed into a c-ITO film over a predetermined area via the heat accumulation energy supplied by the high repetition rate laser beam, and the unirradiated a-ITO film is then removed using an acidic etchant solution. The fabricated c-ITO patterns are observed using scanning electron microscopy and cross-sectional transmission electron microscopy. The crystalline, optical, electrical properties were measured by X-ray diffraction, spectrophotometer, and four point probe station, respectively. The experimental results show that a high repetition rate reduces thermal shock and yields a corresponding improvement in the surface properties of the c-ITO patterns.

Original languageEnglish
Pages (from-to)7138-7142
Number of pages5
JournalThin Solid Films
Volume518
Issue number23
DOIs
StatePublished - 30 Sep 2010

Keywords

  • Femtosecond laser
  • Inidum tin oxide
  • Laser crystallization
  • Patterning
  • Scanning electron microscopy
  • Transmission electron microscopy
  • X-ray diffraction

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