Passivation of defects in a-Si:H TFTs with 150°C supercritical fluids

Po Yu Yang*, Po-Tsun Liu, Ting Chang Chang, Yi Li Cheng

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, the supercritical fluids act the transporter and deliver H2O molecule into the a-Si:H film for repairing defects. From experiment results, superior transfer characteristic is obtained after the treatment of supercritical fluids mixed with water and propyl-alcohol. Besides, density of states is also reduced significantly during this processing.

Original languageEnglish
Title of host publicationIDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings
Pages500-502
Number of pages3
StatePublished - 1 Dec 2007
EventInternational Display Manufacturing Conference and Exhibition, IDMC 2007 - Taipei, Taiwan
Duration: 3 Jul 20076 Jul 2007

Publication series

NameIDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings

Conference

ConferenceInternational Display Manufacturing Conference and Exhibition, IDMC 2007
CountryTaiwan
CityTaipei
Period3/07/076/07/07

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  • Cite this

    Yang, P. Y., Liu, P-T., Chang, T. C., & Cheng, Y. L. (2007). Passivation of defects in a-Si:H TFTs with 150°C supercritical fluids. In IDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings (pp. 500-502). (IDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings).