Parameter extraction of resistive thermal microsensors by A.C. electrical method

Yang-Mang Ou, Chin Shown Sheen, Jin Shown Shie

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

Device parameters of thermal microsensors are essential for evaluating the sensor performances and their simulation modeling. We report an A.C. electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficience of resistance, thermal capacitance and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results obtained are compared with other methods.

Original languageEnglish
Title of host publicationIMTC 1997 - IEEE Instrumentation and Measurement Technology Conference
Subtitle of host publicationSensing, Processing, Networking, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages893-897
Number of pages5
ISBN (Electronic)0780337476
DOIs
StatePublished - 1 Jan 1997
Event14th Annual IEEE Instrumentation and Measurement Technology Conference, IMTC 1997 - Ottawa, Canada
Duration: 19 May 199721 May 1997

Publication series

NameConference Record - IEEE Instrumentation and Measurement Technology Conference
Volume2
ISSN (Print)1091-5281

Conference

Conference14th Annual IEEE Instrumentation and Measurement Technology Conference, IMTC 1997
CountryCanada
CityOttawa
Period19/05/9721/05/97

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