Parameter extraction of resistive thermal microsensors by AC electrical method

Yang-Mang Ou*, Chin Shown Sheen, Jin Shown Shie

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


Obtaining device parameters of thermal microsensors is essential for evaluating their performances and simulation modeling. We report an ac electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficient of resistance, thermal capacitance, and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results are compared with other methods.

Original languageEnglish
Pages (from-to)403-408
Number of pages6
JournalIEEE Transactions on Instrumentation and Measurement
Issue number2
StatePublished - 1 Dec 1998


  • AC electrical method thermal variables measurement
  • Electrothermal effect
  • Parameter extraction
  • Thermal microsensors

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